CLEANING SOLUTION GENERATOR, CLEANING SOLUTION GENERATING METHOD, SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cleaning solution generator in which cleaning performance can be enhanced, and to provide a cleaning solution generating method, a substrate cleaning device and a substrate cleaning method.SOLUTION: A cleaning solution generator 2 includes a mixing section 13 for generating a mixture by mixing hydrogen peroxide water to acidic or alkaline liquid, and raising the pressure of the mixture thus generated by the vapor generated by oxygen gas generated by decomposition of hydrogen peroxide water or reaction heat, and a bubble generating section 14 for generating multiple microbubbles in the mixture by releasing the pressure of the mixture raised by the mixing section 13.