| 摘要 |
An apparatus for testing a substrate includes a support part which supports a substrate to arrange the substrate in a vertical direction in order to prevent the adhesion of foreign materials, and a measurement part which is arranged to face the support part for preventing the adhesion of the foreign material and detects the substrate. The apparatus for testing a substrate can improve the reliability of the apparatus for testing a substrate by preventing damage to the measurement part and the measurement result distortion of the measurement part due to the foreign materials. |
