CLEANNESS MONITORING SYSTEM AND CARTRIDGE

摘要

A cleanness monitoring system for monitoring the cleanness of an automatic material handling system, and a cartridge (100) of an automatic material handling system. The cleanness monitoring system comprises: a cleanness measurement device (210) which is mounted at the cartridge (100) and used for measuring cleanness and to obtain measured data, a first signal transceiving device (220) which is mounted at the cartridge (100) and used for converting the measured data received into a wireless signal for transmission, a second signal transceiving device (230) which is mounted in a predetermined position outside the cartridge (100) and used for receiving the wireless signal, and a measurement host machine (340) which is used for reducing the received wireless signal into the measured data. The cleanness monitoring system and cartridge (100) can lower costs.