发明名称 CARRIER WARPAGE CONTROL FOR THREE DIMENSIONAL INTEGRATED CIRCUIT(3DIC) STACKING
摘要 <p>In the embodiment, a method of forming a package-on-package (PoP) device includes a step of temporally mounting a carrier on a substrate, a step of stacking a first die on the substrate, and a step of stacking a second die on the first die. The coefficient of thermal expansion of a first die or/and the substrate mismatches that of a carrier. The substrate can be formed as one among an organic substrate, a ceramic substrate, a silicon substrate, a glass substrate, and a laminate substrate</p>
申请公布号 KR20140026241(A) 申请公布日期 2014.03.05
申请号 KR20130072150 申请日期 2013.06.24
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LIN JING CHENG;LIN SHIH TING;YU CHEN HUA
分类号 H01L23/14;H01L23/12;H01L23/48 主分类号 H01L23/14
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