发明名称 Method of flip-chip hybridization for the forming of tight cavities and systems obtained by such a method
摘要 A method for manufacturing a microelectronic assembly including stacked first and second microelectronic components having a cavity therebetween including defining said cavity by means of a lateral wall forming a closed frame extending around a determined area of the first component except for an opening used as a vent; forming within the closed frame and opposite to the vent an obstacle capable of forming, in cooperation with the lateral wall, a bypass duct for the filling material; performing a flip-chip hybridization of the first and second components, a surface of the second component resting on the upper edge or end of the lateral wall formed on the first component to form said at least one cavity; injecting the filling material in liquid form between the two hybridized components to embed said at least one cavity and to make it tight by obstruction of the vent as said filling material solidifies.
申请公布号 US8664778(B2) 申请公布日期 2014.03.04
申请号 US201213531842 申请日期 2012.06.25
申请人 MARION FRANCOIS;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 MARION FRANCOIS
分类号 H01L23/28 主分类号 H01L23/28
代理机构 代理人
主权项
地址