发明名称 Probe structure and electric tester having a probe structure
摘要 A probe structure and an electric tester having the same are provided to improve accuracy of a position of a probe by preventing misalignment between the probe and a guide member. A probe structure(100) includes a guide member(110) and a probe(120). The guide member has a first penetrating hole(111) and a second penetrating hole(112). The probe includes a fixing unit(122), an elastic member(123), a tip unit(124), and a guide unit(125). The fixing unit is inserted from a lower part of the guide member to the first penetrating hole. The electric signal is inputted to and outputted from the fixing unit. The elastic member is parallel to the guide member. A first end of the elastic member is connected to the fixing unit. The tip unit is formed at a lower surface of a second end of the elastic unit opposing the first end. The tip unit comes in contact with a test target. The guide unit is formed at an upper surface of the elastic unit. The guide unit is inserted into the second penetrating hole in order to guide the elastic unit.
申请公布号 KR101369406(B1) 申请公布日期 2014.03.04
申请号 KR20080006065 申请日期 2008.01.21
申请人 发明人
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
代理机构 代理人
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