| 摘要 |
PROBLEM TO BE SOLVED: To inspect the coating of an inspection object with good precision. SOLUTION: The coating inspection device 10 forms an ultraviolet ray image by receiving fluorescent light from the coating of a substrate 1 exposed to the ultraviolet rays, and forms a visible light image by receiving reflection light from the substrate 1 receiving the visible light. The coating inspection device 10 specifies the position of the substrate 1 using the visible ray image, and inspects the coating of the substrate 1 at least using the ultraviolet ray images among formed images. After correcting the position of the objective inspection image using the specified position of the substrate 1, the coating inspection also may be allowable. COPYRIGHT: (C)2009,JPO&INPIT |
