METHOD OF PRODUCING SUBLIMABLE SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a sublimable single crystal by which cracking of the sublimable single crystal such as SiC due to sublimation and thermal stress of a surface of the single crystal can be suppressed.SOLUTION: A gas generation source 12 capable of generating a gas including a component constituting a sublimable single crystal is arranged in a container 10' and a sublimable single crystal 18' is arranged at a position opposed to the gas generation source 12. Then the sublimable single crystal 18' is annealed while given a temperature gradient &Dgr;T so that the gas generation source 12 is at a higher temperature. After the annealing, a crystal may be further grown on a growth surface.