| 摘要 |
PURPOSE: A vacuum deposition system is provided to prevent outgassing and heating in a vacuum chamber by arranging a motor in the outside of the vacuum chamber when a mask is aligned in the vacuum chamber. CONSTITUTION: A vacuum deposition system comprises a vacuum chamber(10), a substrate transferring unit, and 6-axial alignment system(30). A deposition procedure is implemented in the vacuum chamber. The substrate transferring unit transfers and aligns a substrate in the vacuum chamber. The 6-axial alignment system aligns a mask to accord the substrate and the mask at the bottom of the substrate arranged in the vacuum chamber. The 6-axial alignment system comprises a motion unit(31) and a driving unit(32). The motion unit operates to align the mask. The driving unit runs the motion unit. |
