| 摘要 |
PROBLEM TO BE SOLVED: To suppress the abrasion of electrodes in a microwave discharge device.SOLUTION: A microwave discharge device of the present invention includes: a dielectric substrate 2; a microstrip line 6 disposed on one face 4 side of the dielectric substrate 2; a discharge electrode 14 comprising a terminal portion of the microstrip line 6; and a counter electrode 16 located to face the discharge electrode 14. A microwave is input in the microstrip line 6 to cause microwave discharge in a discharge space between the discharge electrode 14 and the counter electrode 16. A water storage section 34 or the like is provided in the discharge space, and the abrasion of electrodes is suppressed by water W held in the water storage section or the like. |
