发明名称 |
RESONANT MEMS LORENTZ-FORCE MAGNETOMETER USING FORCE-FEEDBACK AND FREQUENCY-LOCKED COIL EXCITATION |
摘要 |
A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device. |
申请公布号 |
US2014049256(A1) |
申请公布日期 |
2014.02.20 |
申请号 |
US201213729516 |
申请日期 |
2012.12.28 |
申请人 |
SILICON LABORATORIES INC.;SILICON LABORATORIES INC. |
发明人 |
SMITH ERIC B.;WAHBY RIAD;ZHOU YAN |
分类号 |
G01R33/028;B81B3/00 |
主分类号 |
G01R33/028 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|