发明名称 |
PARTICLE BEAM MICROSCOPE. |
摘要 |
The particle beam microscope (1) has a magnet lens (3) with an optical axis and a front pole piece (21), which is arranged in an optical path along the optical axis with a spacing before an object plane (19). An object holder is configured to hold an object (5) at an intersection point between the optical axis and the object plane. The X-ray detectors are arranged such that an elevation angle runs between a line and a center of a substrate (35-1). |
申请公布号 |
NL2008042(C) |
申请公布日期 |
2014.02.18 |
申请号 |
NL20112008042 |
申请日期 |
2011.12.27 |
申请人 |
CARL ZEISS NTS GMBH |
发明人 |
BENNER GERD;MEYER STEFAN;NIEDERBERGER STEFFEN;PREIKSZAS DIRK |
分类号 |
G01N23/225;H01J37/244;H01J37/28 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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