发明名称 Spectroscopy technique using merged spectral data
摘要 A method of examining a sample using a spectroscopic apparatus, comprising the following steps: Mounting the sample on a sample holder; Directing a focused input beam of radiation onto a location on the sample, thereby producing an interaction that causes a flux of stimulated photonic radiation to emanate from said location; Examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; Automatically repeating said directing and examining steps for a series of successive locations on the sample, which method comprises the following steps: Choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; For each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; For each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter, different from said first value.
申请公布号 US8653457(B2) 申请公布日期 2014.02.18
申请号 US201313946755 申请日期 2013.07.19
申请人 FEI COMPANY 发明人 STOKS SANDER RICHARD MARIE
分类号 G01N23/00;G21K7/00 主分类号 G01N23/00
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