| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing carbon nanotubes (CNT's) capable of controlling spacing between CNT's over a broad range easily and a low cost.SOLUTION: The method for producing carbon nanotubes includes a carbon nanotube growth step of growing carbon nanotubes on a surface of a substrate by decomposing, with a plasma, a source gas including a carbon source gas and by contacting, with the surface of the substrate, the carbon source gas thus decomposed. There is placed a blocking member which is capable of permitting arrival, at the substrate surface, of the carbon source gas decomposed in a plasma generating region and, on the other hand, of blocking the arrival, at the substrate surface, of the carbon source gas decomposed within the plasma generating region. The source gas further includes a nitrogen-containing gas having a molecular structure containing a nitrogen atom, and a content of nitrogen atoms derived from the nitrogen-containing gas in the source gas is 20 mg/L or less. |
