| 摘要 |
PURPOSE: An annealing furnace sample loading apparatus is provided to be equipped with a sample fixing unit to reduce the heat deviation applied to a fixed sample, thereby stably fixing the sample on the sample fixing unit together with minimum contact and reduce the thickness deviation of an oxidized layer formed on the surface of the sample. CONSTITUTION: An annealing furnace sample loading apparatus includes a sample fixing unit and a drive unit. The sample fixing unit reduces the thermal deviation applied to a fixed sample. The drive unit loads the sample fixing unit into the annealing furnace and withdraws the sample fixing unit from the annealing furnace. |
