发明名称 DEVELOPING SOLUTION PROCESSING DEVICE AND PROCESSING METHOD
摘要 The purpose of the present invention is to provide a developing solution processing device and processing method that solve problems that accompany the occurrence of scum, improve product defect rate, increase the utilization ratio of manufacturing devices, and contribute considerably to reduced manufacturing costs and other factors through highly efficient recovery of noble metals. The present invention provides a developing solution processing device provided with: a centrifuge for separating a clarified liquid and a residue by centrifugally separating out developing solution after development processing; and a defoaming device for defoaming and discharging the clarified liquid.
申请公布号 WO2014021043(A1) 申请公布日期 2014.02.06
申请号 WO2013JP68087 申请日期 2013.07.02
申请人 TORAY INDUSTRIES, INC. 发明人 HORIUCHI, KEN;KONDO, ATSUSHI
分类号 G03F7/30;B01D19/00 主分类号 G03F7/30
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