| 摘要 |
<p>Solar absorber layer system on a substrate, comprises a base layer which is highly reflective in infrared region, and arranged upstream of the substrate, an absorber layer which is formed as a gradient layer, preferably a cermet gradient layer having metallic- and ceramic components, and arranged above the base layer, and a reflection-increasing coating layer arranged above the absorber layer. At least one of the metallic- and ceramic components comprises a matrix and the other comprises particles distributed in the matrix. The ceramic component comprises aluminum-doped zinc oxide. Independent claims are also included for: (1) producing the gradient layer on a substrate by cathode sputtering of at least two targets, comprising moving the substrate towards the target, and coating the substrate with a layer having graded composition, where the deposition of the cermet gradient layer is carried out by at least one double target, whose first target deposits the ceramic component of the cermet (ceramic target), which comprises a ceramic, and second target supplies the metallic component of the cermet (metallic target), which comprises an oxide, nitride or oxynitride of the metallic component or its metal; and (2) a device for depositing the gradient layer of the solar absorber layer system, which is arranged in a vacuum coating system, comprising at least one coating compartment (1) which comprises at least two cathodes which are respectively equipped with a target, and are present opposite to the substrate, as a coating source, a process gas conduction system for producing vacuum environment for coating process, a transport system (6) for moving the substrate with respect to the coating source, and the double target (13) for depositing the cermet gradient layer on the substrate.</p> |
