| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern measurement instrument and a contour line extraction device which are capable of setting a length measurement box having a proper size in a proper position or setting an edge extraction area for contour line extraction, independently of pattern shift and the like.SOLUTION: Peak detection is performed on a prescribed edge extraction area on the basis of acquisition of a brightness profile in the prescribed edge extraction area, and a peak is taken as a reference peak to determine whether another peak exists in the edge extraction area or not. If another peak exists in the edge extraction area, an interval in a brightness profile acquisition direction of the edge extraction area is reduced so as to not include another peak in the edge extraction area. |
