发明名称 |
Oxygen engineered single-crystal REO template |
摘要 |
A method of forming a template on a silicon substrate includes epitaxially growing a template of single crystal ternary rare earth oxide on a silicon substrate and epitaxially growing a single crystal semiconductor active layer on the template. The active layer has either a cubic or a hexagonal crystal structure. During the epitaxial growth of the template, a partial pressure of oxygen is selected and a ratio of metals included in the ternary rare earth oxide is selected to match crystal spacing and structure of the template at a lower interface to the substrate and to match crystal spacing and structure of the template at an upper interface to crystal spacing and structure of the semiconductor active layer. A high oxygen partial pressure during growth of the template produces a stabilized cubic crystal structure and a low oxygen partial pressure produces a predominant peak with a hexagonal crystal structure. |
申请公布号 |
US8636844(B1) |
申请公布日期 |
2014.01.28 |
申请号 |
US201213543093 |
申请日期 |
2012.07.06 |
申请人 |
DARGIS RYTIS;CLARK ANDREW;LEBBY MICHAEL;TRANSLUCENT, INC. |
发明人 |
DARGIS RYTIS;CLARK ANDREW;LEBBY MICHAEL |
分类号 |
C30B25/00 |
主分类号 |
C30B25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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