APPARATUS AND METHOD FOR MANUFACTURING POLYSILICON

摘要

Disclosed are apparatus for manufacturing polysilicon comprising a first fluidized bed reactor which stores silicon particles and grows the silicon particles by receiving a first silicon containing gas (the first silicon containing gas flows towards an upper side by being supplied to the inner space of the first fluidized bed reactor); a separator which separates silicon fine powders leaked from the first fluidized bed reactor according to particle size (in the separator, the silicon powders are separated into first silicon fine powers having smaller particle size than that of the silicon particles, and second silicon fine powders having smaller particle size that that of the first silicon fine powders); a second fluidized bed reactor which receives the silicon fine powders from the separator, grows the first silicon fine powders so that the first silicon fine powders have a size corresponding to the size of the silicon particles by receiving the second silicon containing gas and supplies the grown silicon fine powders to the upper part of the first fluidized bed reactor; and a back filter which filters the second silicon fine powders supplied from the separator and supplies the filtered second silicon fine powders to the lower part of the first fluidized bed reactor, and a method for manufacturing polysilicon. The apparatus for manufacturing polysilicon and the method for manufacturing polysilicon are able to reduce the manufacturing costs of polysilicon by reducing the amount of waste silicon fine powders and is able to facilitate the manufacture of polysilicon by preventing the degradation of an operation due to silicon fine powders having a large size. [Reference numerals] (AA) Second silicon fine powders; (BB) Silicon fine powders; (CC) Second reactive silicon fine powders; (DD) First silicon fine powders; (EE) Reactive silicon fine powders; (FF) First reactive silicon fine powders; (GG) First silicon containing gas; (HH) Second silicon containing gas; (II) Grown first silicon fine powders; (JJ) Filtered second silicon fine powders and second reactive silicon fine powders