发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for forming the same includes a pillar formed over a semiconductor substrate, a buried bit line formed below the semiconductor substrate, a vertical gate formed over a sidewall of the pillar, an insulation film pattern formed to expose one side of the vertical gate disposed between the pillars, and a word line coupled to the exposed vertical gate. The vertical gate is formed to cover a portion of a sidewall of the pillar with a metal material, a word line overlaps with some parts of the vertical gate, and some parts of the pillar are shifted to be coupled to the vertical gate.
申请公布号 US2014021537(A1) 申请公布日期 2014.01.23
申请号 US201313846884 申请日期 2013.03.18
申请人 SK HYNIX INC. 发明人 KIM SEUNG HWAN;SIM JAI HOON
分类号 H01L29/423 主分类号 H01L29/423
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