| 摘要 |
Provided is an ultrapure water production device with which fewer reverse osmosis membrane separation devices are installed. An ultrapure water production device provided with a primary pure water system (2) and a sub-system (3) for treating treated water of the primary pure water system (2), a reverse osmosis membrane separation device being provided to at least the primary pure water system (2); wherein the ultrapure water production device is characterized in that the reverse osmosis membrane separation device installed in the primary pure water system (2) is a high-pressure reverse osmosis membrane separation device and is installed at a single stage. The high-pressure reverse osmosis membrane separation device has the properties of a standard operating pressure of 5.52 MPa, a pure water flux of 0.5 m3/m2·D or higher, and an NaCl removal rate of 99.5% (32,000 mg/L of NaCl) or higher. |
