| 摘要 |
PROBLEM TO BE SOLVED: To provide a control element which responds to a request for enhancing the irradiation accuracy of a charged particle beam to an object, and to provide a charged particle beam device using the same.SOLUTION: Control elements 6a-6c include, respectively, a cylinder 7 composed of ceramic in which a through hole P for passing a charged particle beam is formed, and an electrode 8 bonded to the inner peripheral surface S1 of the through hole P in the cylinder 7. The electrode 8 has a palladium film bonded to the inner peripheral surface S1 of the cylinder 7, and a rhodium film bonded to the inner peripheral surface S1 of the cylinder 7 with the palladium film interposed therebetween. Bond strength of the cylinder 7 and the electrode 8 can be enhanced, and control of the charged particle beam by the electrode 8 can be stabilized. |
