| 摘要 |
<p>Provided in the present invention is a film forming apparatus which is to simplify driving equipment and to control the quality degradation of a film forming substrate by reducing the concerns over the attachment of particles to a substrate. The film forming apparatus has a returning device (10) including multiple returning rollers (11) for returning the substrate (101), and has a simple structure. The returning rollers (11) are placed in the lower part of the substrate (101). Therefore, even when particles are generated by the rotation of the returning rollers (11), the possibility of the attachment of the particles to the substrate (101) placed at a higher position than the returning roller (11) is reduced. In addition, driven rollers (12, 13) rotate by being in contact with the wall surface of a groove unit (30) formed on the upper part of a returning tray (20). The returning tray (20) and the substrate (101) can be smoothly returned by regulating the position of the returning tray (20) from the upper side.</p> |
