| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem, in sampling of adhesives or the like on a planar sample such as a magnetic disc, with a silicon wafer or the like the analytical precision of which is lowered due to pollution from the edge part of the sample or the like. SOLUTION: In order to specify a part to be sampled, structure is adopted with a hollow tube such as a cylinder having a double structure or the like is arranged on the sample surface and that a solvent is injected into a sampling space surrounded by the tube and the sample surface. Pollution from the air is prevented, and pollution from a device is prevented by using a cover, having a mechanism for flowing a scavenger gas into the sampling space, and the analytical precision can be improved by ascertaining the sampling area and controlling the quantity of the solvent.
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