发明名称 DEFLECTING ELECTRODE MADE BY ELECTROCONDUCTIVE CERAMICS
摘要 PROBLEM TO BE SOLVED: To constitute a deflecting electrode by an electroconductive material not to yield deterioration, and form a metallized layer superior in bond strength and solder wettability and having a uniform film thickness. SOLUTION: On a surface of deflecting electrode main body 2 constituted of ceramics consisting of electroconductive oxide and sintering additives, a metallized layer composed of an adhering metallized layer 3 constituted by the electroconductive material containing at least one of Ti, Cr, Zr, Ni and a metallized layer 4 for connection constituted by the electroconductive material containing at least one of Cu, Ni, Au, Pt, Ag is installed.
申请公布号 JP2002203504(A) 申请公布日期 2002.07.19
申请号 JP20000401450 申请日期 2000.12.28
申请人 FUJITSU LTD 发明人 IMANAKA YOSHIHIKO
分类号 G03F7/20;C04B41/51;C04B41/90;H01J37/147;H01L21/027;(IPC1-7):H01J37/147 主分类号 G03F7/20
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