| 摘要 |
A sag compensation apparatus and method for a photoresist coating nozzle are provided to correct a sagged photoresist coating nozzle by pulling the sagged portion of the nozzle toward a cross bar. A cross bar(10) includes a combination hole on the lower side. A plurality of sag correction blocks(20) are coupled with the bottom surface of the cross bar in order to compensate a sagged state by height control. A photoresist coating nozzle(30) is coupled with the bottom surface of the sag correction blocks such that the sag correction blocks are positioned between the cross bar and the photoresist coating nozzle. |
