发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The second insulating film seals the hole near an interface of the insulating layer and the select gate. The second insulating film is provided on a side wall of the channel body with a space left in the hole above the select gate. The method can include burying a semiconductor film in the space, in addition, forming a conductive film in contact with the channel body.
申请公布号 US2014001544(A1) 申请公布日期 2014.01.02
申请号 US201313930401 申请日期 2013.06.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATO MITSURU;KITO MASARU;ISHIDUKI MEGUMI;KATSUMATA RYOTA
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
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