发明名称 PRESSING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a structure of a pressing mechanism for heating or cooling a plane member by pressing it, capable of equally pressing it.SOLUTION: A pressing mechanism for heating or cooling a plane member by pressing it includes: first and second blocks that nip the plane member and each of which has a heating part or a cooling part; a plurality of first layer supporting members that are arranged in contact with a pressed surface of the second block and are divided into a plurality of groups; a plurality of first layer pressing plates that are arranged so as to nip the plurality of first layer supporting members between the second block and themselves, and that are arranged in contact with the plurality of first layer supporting members by corresponding to the plurality of groups; a plurality of second layer supporting members that are arranged in contact with pressed surfaces of the plurality of first layer pressing plates; a second layer pressing plate that is arranged so as to nip the plurality of second layer supporting members between pressed surfaces of the first layer pressing plates and itself; and a driving source that presses the second layer pressing plate toward the second block. Each of the supporting members has a curved surface to be brought into contact with at least one of each of the contact surfaces.
申请公布号 JP2013258401(A) 申请公布日期 2013.12.26
申请号 JP20130103129 申请日期 2013.05.15
申请人 SHOWA SHINKU:KK 发明人 SHIONO TADAHISA;NAKATSUKA SATOSHI;MORI HIRONOBU
分类号 H01L23/02 主分类号 H01L23/02
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