DIAMOND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a diamond semiconductor device and a manufacturing method of the same, which achieve a simple manufacturing process and good pn junction interface.SOLUTION: A diamond semiconductor device comprises: diamond semiconductor elements each including a diamond substrate 10 having {100} plane, a p-type diamond layer 20 formed on the substrate and an n-type diamond layer 30 grown from a stepwise base angle 50 having a lateral face of {110} plane and a bottom face of {100} plane which are formed on the substrate; and a separation region for separating the diamond semiconductor elements, which is grown from the stepwise base angle 50 having a lateral face of {100} plane and the bottom face of {100} plane which are formed on the substrate.