APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

A device for transferring substrates includes: a driving gear formed at the outer part of a chamber; and a driven gear formed inside the chamber and transferring the substrates by rotating a shaft by driving force delivered from the driving gear. A circular magnetic body in which the driven gear has an accommodation groove for accommodating the shaft and north pole and south pole are alternately arranged; a bearing arranged around the magnetic body in order for the magnetic body to be smoothly rotated; and a holder for forming the bearing and the magnetic body in an integrated structure. The device is formed to be fixed at one side wall inside the chamber.