| 摘要 |
The invention relates to a charged-particle apparatus equipped with improved Wien-type C c corrector. A charged particle apparatus (TEM, STEM, SEM) with a double-focusing ExB filter as a corrector for an objective lens is known to the person skilled in the art. Inventors realized an improved corrector by introducing a drift space in the middle of the corrector, thereby dividing the corrector in two, preferably identical, modules. This results in a corrector with, for identical excitation, a larger negative C c and enables positioning an energy selective slit in the mid-plane, thus enabling the corrector to simultaneously act as an energy filter. A simulation of two ExB modules with a length of 25 mm, divided by a drift space of 10 mm, is discussed. |
