发明名称 PHOTORESIST COMPOSITION
摘要 <p>The present invention relates to a photoresist composition which includes a resin in which solubility in an alkaline water solution increases by the action of the photoresist composition, an acid generating agent, a plasticizer, and a solvent. The amount of the solvent is 40-75 mass % against the total amount of the photoresist composition.</p>
申请公布号 KR20130138129(A) 申请公布日期 2013.12.18
申请号 KR20130064736 申请日期 2013.06.05
申请人 SUMITOMO CHEMICAL CO., LTD. 发明人 KAWAMURA MAKI;NAKANISHI JUNJI
分类号 G03F7/004;G03F7/028;G03F7/26;H01L21/027 主分类号 G03F7/004
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