| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection device capable of making a strict quality determination without being affected by unevenness in film formation while maintaining excellent inspection resolution and a short inspection tact.SOLUTION: A visual inspection device includes a luminance difference calculation part which includes an inspection pattern specification part for specifying a part of an area of image data acquired by an image acquisition part as an inspection object pattern image, a luminance information acquisition part for acquiring luminance information for each of division areas obtained by dividing the inspection object pattern image into a matrix, and a criterion pattern registration part for registering a previously acquired inspection object pattern as a criterion pattern, and compares the criterion pattern with an inspection object pattern as an object of quality determination acquired next to calculate a difference in luminance information, a quantity reference registration part which registers in advance a reference value for quality determination corresponding to a difference of luminance information on each division area calculated by the luminance difference calculation part for each division area, and a quality determination part which makes quality determination for each division area of the inspection object pattern on the basis of the reference value for quality determination. |
