Broadband hyperspectral spectrophotometer for analyzing component e.g. photodiode, has focusing assembly arranged relative to dispersing prism for focusing optical beam from prism towards detection assembly

摘要

The spectrophotometer (10) has a stage (S) to support a component (C) to be analyzed and to move the component along an axis (X). An inlet slot (F) is intended to pass an optical beam from the component to be analyzed. A detection assembly (DET) is sensitive for detection of beam ranging from infrared to visible range. A collimating mirror (M3) is arranged relative to the stage for collimating the optical beam from the inlet slot towards a dispersing prism (P). A focusing assembly (FOC) is arranged relative to the prism for focusing the beam from the prism towards the detection assembly. An independent claim is also included for a method for analyzing a component.