| 摘要 |
The present invention relates to an automatic seeding system of a single crystal growth furnace, which comprises at least one individual heating element divided into multiple heating zones and arranged outside a crucible, a monitor unit monitoring the upper side of the melt of the crucible, a convection control unit receiving the information of the monitor unit, and controlling the power supply to the individual heating element, and an automatic seeding device automatically performing single crystal growth by receiving a signal that the melt convection control is completed, from the convection control unit, and automatically moving a seed crystal to up and down. As such, the present invention provides effects to be able to obtain a single crystal growth process and convective flow information by monitoring the convective flow state and the temperature of the melt in each zone with multiple optical probes arranged on the top of the growth furnace, and, therefore, to be able to control so as to occur appropriate convective flow in each zone by independently controlling multiple individual heating elements installed around the crucible with the convective flow information. Further, the present invention has effects to improve the workability of the single crystal growth, and to be able to obtain a high quality single crystal ingot by growing a single crystal by automatically ascending and descending a rod in which a seed crystal is attached by the automatic seeding device when the melt convection within the furnace is normally performed by the convection control unit. [Reference numerals] (AA) Vacuum system |
