| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of correcting variation in the output signal of an oscillator and suppressing increase of the number of components.SOLUTION: An angular velocity sensor comprises: an oscillator (19) displaceable in an x direction and a y direction having orthogonal relations to each other; a package (70) for housing the oscillator in a closed space; drive parts (25, 34, 27, 37, 55) for oscillating the oscillator at a predetermined driving period in the x direction; displacement detection parts (29, 35, 28, 38, 56) for detecting a displacement amount of the oscillator in the y direction with a predetermined phase at the driving period; and a correction part (57) for correcting output signals of the displacement detection parts. The displacement detection parts detect a plurality of displacement amounts of the oscillator in the y direction with different phases. The correction part corrects temperature characteristics of the output signals of the displacement detection parts on the basis of the plurality of displacement amounts of the oscillator in the y direction detected with the different phases. |
