| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding table which reduces the possibility that contaminants adhere to or a scratch is made to a plate object suctioned and held by the holding table.SOLUTION: A holding table holding a plate object includes: an annular holding part holding an outer peripheral part of the plate object and having an annular holding surface; and a center recessed part enclosed by the annular holding part. In the annular holding part, a suction port opening on the annular holding surface, a suction path where one end communicates with the suction port and the other end connects with a suction source, a liquid jet port opening on the annular holding surface at the outer peripheral side of the suction port, and a liquid passage where one end communicates with the liquid jet port and the other end connects with a liquid supply source are formed. |
