Nanoparticle generator and processing apparatus by core-shell hot-wire and method thereof

摘要

PURPOSE: A nanoparticle generator and processing apparatus is provided to generate nanoparticles by a core-shell wire and to form a coating film after depositing nanoparticles. CONSTITUTION: A nanoparticle generator and processing apparatus(100) comprises a nanoparticle generating unit(110) and a nanoparticle treating unit(120). The nanoparticle generating unit is mounted to a reaction chamber and generates nanoparticles. The nanoparticle treatment part is mounted to the reaction chamber and coats a substrate with the nanoparticles. The nanoparticle generating unit comprises a core-shell wire which consists of a core wire and a shell coated on the core wire. The core wire is formed of metal with a melting point of 1064>= or more and the coating material of the shell is a metal with a melting point of 1064>= or less. Nanoparticle generation and treatment are conducted at room temperature and atmospheric pressure. [Reference numerals] (140,140') Power supplying unit; (150) Temperature control unit; (160) Temperature monitor; (170) Filter;