发明名称 LASER REMOVAL OF CONDUCTIVE SEED LAYERS
摘要 A method for making conductive traces and interconnects on a surface of a substrate includes, for an embodiment, forming a dielectric or polymer layer on the surface of the substrate, forming a seed layer of an electrically conductive material on the dielectric or polymer layer, patterning a photoresist on the seed layer, forming the conductive traces on the patterned photoresist and seed layer, removing the photoresist from the substrate, and irradiating the surface of the substrate with a fluence of laser light effective to ablate the seed layer from areas of the substrate surface exclusive of the conductive traces.
申请公布号 EP2663419(A2) 申请公布日期 2013.11.20
申请号 EP20120704145 申请日期 2012.01.11
申请人 TAMARACK SCIENTIFIC CO. INC. 发明人 SOUTER, MATTHEW E.
分类号 B23K26/06;B23K26/08;H01L21/768 主分类号 B23K26/06
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