| 摘要 |
PURPOSE: An apparatus and method for measuring the flatness of a carrier are provided to improve the accuracy of measurement by including a sensing unit which measures the flatness of a substrate attaching surface. CONSTITUTION: A carrier(20) is loaded on a holder. A substrate is attached to the carrier. A rotating unit(200) rotates the holder. A sensing unit(300) is relatively moved on the lower side of the holder and measures the flatness of the substrate attaching surface. |
