发明名称 POLISHING TOOL FOR HIGH EFFICIENCY PRECISION WORKING AND METHOD FOR MANUFACTURING THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a polishing tool that can achieve high efficiency precision polishing that cannot be achieved by conventional polishing tools, by using crystals of large particles as abrasive grains, and that causes no falling of the abrasive grains.SOLUTION: A polishing tool is provided that includes a polishing part with a plurality of abrasion grains fixed thereto. In the polishing tool, respective abrasion grains are held by a holding frame with a front face disposed along a tool substrate face, having openings of sizes preventing fall of the abrasion grains and having at least same number as the number of the abrasion particles, and are confined in an abrasion grain containing space demarcated on a back face of the holding frame, parts of the respective abrasion grains are protruded from the openings, and the protruded parts have heights of limited ranges from a surface of the holding frame. A method for manufacturing the polishing tool is also provided.
申请公布号 JP2013230535(A) 申请公布日期 2013.11.14
申请号 JP20120104966 申请日期 2012.05.01
申请人 SHINGIJUTSU KAIHATSU KK 发明人 ISHIZUKA HIROSHI
分类号 B24D3/02;B24B53/12;B24D3/00;H01L21/304 主分类号 B24D3/02
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