| 摘要 |
PROBLEM TO BE SOLVED: To restrain breakage of a discharging container while restraining deterioration of an ultraviolet ray radiation amount with a discharging lamp for radiating vacuum ultraviolet rays.SOLUTION: A discharging lamp 10 comprises: a discharging container 1 having upper and lower wall plates 1a, right and left side wall plates 1b, and front and back side wall plates 1c; discharging gas for excimer light emission filled inside the discharging container 1; and electrodes 2, 3 provided on at least one of the upper and lower side plates outside the discharging container. The right and left side wall plates are curved to project outside the discharging container on a cross section parallel to the front and back side wall plates, and a light shielding membrane 4 shielding ultraviolet rays is formed on inner faces of the right and left side wall plates. The light shielding membrane covers inside of peak sections P1 of curves of the right and left side wall plates. On a cross section parallel to the front and back side wall plates, an angle &thetas; formed by a straight line L3 connecting an intersection point C of a straight line L1 at a middle of the upper and lower wall plates and a straight line L2 connecting boundaries of the upper and lower wall plates and the right and left side wall plates with one end B21 of the light shielding membrane, and a straight line L4 connecting the intersection point with the other end B22 of the light shielding membrane is 60 degrees or more and less than 180 degrees. |
