发明名称 |
POSITION MEASURING APPARATUS, PATTERN TRANSFER APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE |
摘要 |
A position measuring apparatus configured to measure a position of an measured object using a plate-like scale including a grating pattern, includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, in which the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction. |
申请公布号 |
US2013293889(A1) |
申请公布日期 |
2013.11.07 |
申请号 |
US201313863735 |
申请日期 |
2013.04.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
EMOTO KEIJI;MARUYAMA NAOKI |
分类号 |
G01B11/27 |
主分类号 |
G01B11/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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