| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved method, system, or software for automatic defect classification on the basis of inspection data.SOLUTION: A method for classification comprises the steps of: receiving inspection data associated with a plurality of defects detected in one or more samples; receiving one or more benchmark classification results including classes corresponding respectively to the plurality of defects; and evaluating a preparation determination reference for one or more classes including compatibility of inspection data for training automatic defect classifiers for classes regarding the respective classes, on the basis of the one or more benchmark classification results. A portion of the inspection data is selected by corresponding to one or more defects associated with one or more classes satisfying the preparation determination reference. One or more automatic classifiers are trained for one or more classes satisfying the preparation determination reference by using the selected portion of the inspection data. |
