PRECURSORS FOR DEPOSITING GROUP 4 METAL-CONTAINING FILMS

摘要

PROBLEM TO BE SOLVED: To provide a Group 4 metal-containing precursor for manufacturing a metal oxide improved in process reproducibility.SOLUTION: A Group 4 metal-containing precursor is represented by a following formula I (wherein M is a metal chosen from Ti, Zr and Hf; R and Rare each selected independently from an alkyl group comprising from 1 to 10 carbon atoms; and Rand Rare different alkyl groups).