| 摘要 |
PROBLEM TO BE SOLVED: To improve a grinding device that can be suitably used for the one-side grinding of a workpiece (34) such as a wafer formed of a hard and brittle material so that a grinding fluid is effectively supplied to a grindstone (18) of a grinding wheel (16) or a contact part between the grindstone (18) and the workpiece (34).SOLUTION: A grinding fluid supply means includes an inside grinding fluid injection means (30) and an outside grinding fluid injection means (32) for injecting grinding fluids to an inner peripheral surface and outer peripheral surface of a grindstone (18), respectively, in a grinding region where the grindstone (18) is pushed to one side of a workpiece (34). |
