发明名称 |
ACTIVE COMPENSATED STAGE HAVING 5-DOF MOTION ERROR COMPENSATION AND MOTION ERROR COMPENSATING METHOD THEREOF |
摘要 |
<p>Disclosed are an actively compensated stage including: a guide support having first and second guide surfaces perpendicular to each other; a table having first and second sides opposite the first and second guide surfaces and having air bearings on the first and second sides; a driving linear motor moving the table straight in an x-axial direction; and a plurality of magnetic actuators applying a magnetic preload between the guide support and the table and changing a magnetic force between the guide support and the table to compensate for 5-DOF motion errors generated in the table.</p> |
申请公布号 |
KR101318211(B1) |
申请公布日期 |
2013.10.15 |
申请号 |
KR20110052297 |
申请日期 |
2011.05.31 |
申请人 |
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发明人 |
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分类号 |
B23Q1/25;B23Q5/28;H01L21/68 |
主分类号 |
B23Q1/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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