| 摘要 |
PROBLEM TO BE SOLVED: To provide a board for vapor deposition with which an electrode foil with little variation in capacitance thereof can be formed by improving homogeneity of a coarse film layer, and to provide a vapor deposition apparatus using the same.SOLUTION: A board for vapor deposition includes a substrate 20 formed with a recessed groove 19 on the surface thereof. A plurality of first thin grooves 21 formed in a longitudinal direction of the recessed groove 19 are provided in a bottom part 19A of the recessed groove 19. The first thin grooves 21 are each configured in a V-shaped groove that has a tapered vertical section. Thus, vapor deposition material can be evenly spread throughout the inside of the recessed groove 19. As a result, a homogeneous coarse film layer can be formed. |
