| 摘要 |
PROBLEM TO BE SOLVED: To provide an Ag alloy film having excellent resistance such as moisture resistance, sulphur resistance and heat resistance, also having high reflectance and having low resistivity, and a method for forming the same.SOLUTION: An Ag-Sb alloy film is formed by heat-treating an Ag alloy film-formed by performing sputtering on a substrate using an Ag-Sb alloy target essentially composed of Ag and including 0.5 to 2.0 at% Sb at 150 to 450°C. By the heat treatment, the crystal grains of the Ag-Sb alloy grow in an in-plane direction, and large crystal grains are formed to improve its reflectance. Further, accumulated Sb forms oxides on the surfaces and grain boundaries of the crystal grains, thus it has excellent resistance in heat resistance, salt water resistance and sulfur resistance, and the resistivity of the film itself is reduced as well. |
